High performance surface inspection method for thin-film sensors

Author(s) Volkmar Wieser
Felix Kossak
Stefan Larndorfer
Bernhard Moser
Title High performance surface inspection method for thin-film sensors
Booktitle Machine Vision Applications in Industrial Inspection XV, Electronic Imaging 2007 Proc
Typ Inproceedings
Month January/February
Year 2007
Volume 6503
Serie Electronic Imaging 2007 Proc.
Editor(s) F. Meriaudeau, K. S. Niel
Address San Jose, California, USA
SCCH # 0638