High performance surface inspection method for thin-film sensors

V. Wieser, F. Kossak, S. Larndorfer, B. Moser. High performance surface inspection method for thin-film sensors. volume 6503, 2007.

Autoren
  • Volkmar Wieser
  • Felix Kossak
  • Stefan Larndorfer
  • Bernhard Moser
Editoren
  • F. Meriaudeau
  • K. S. Niel
BuchMachine Vision Applications in Industrial Inspection XV, Electronic Imaging 2007 Proc
TypIn Konferenzband
SerieElectronic Imaging 2007 Proc.
Band6503
Jahr2007